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Ion milling device for FIB post-processing NanoMill Model1040
IAE
57 Institute of Advanced Energy North Building 2 (partially located in the DuET experiment building in North Building 1)
Institute of Advanced Energy North Building 2 (partially located in the DuET experiment building in North Building 1) Institute of Advanced Energy North Building 2 (partially located in the DuET experiment building in North Building 1)
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Ion milling device for FIB post-processing NanoMill Model1040

Model
Model1040
Manufacturer
E. A. FISCHIONE INSTRUMENTS, INC.
Specification
This is a milling device for post-processing TEM samples prepared using FIB (focused ion beams). When preparing samples using FIB, the surface layer often becomes amorphous or gallium is implanted, and such damaged layers can be 10 to 30 nm thick.NanoMill is the ideal device for removing this kind of damaged layer.An image of the sample is acquired using a SED (secondary electron detector), and ions can be milled to only the desired spot, thereby preventing re-deposition.
Location
Institute of Advanced Energy North Building 2 (partially located in the DuET experiment building in North Building 1)
Installation Year
2013
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Overview

This is a milling device for post-processing TEM samples prepared using FIB (focused ion beams). When preparing samples using FIB, the surface layer often becomes amorphous or gallium is implanted, and such damaged layers can be 10 to 30 nm thick.
NanoMill is the ideal device for removing this kind of damaged layer.
An image of the sample is acquired using a SED (secondary electron detector), and ions can be milled to only the desired spot, thereby preventing re-deposition.

Responsible department

Installation Location 57 North Building 2 (partially located in the DuET experiment building in North Building 1)

Available Users

Kyoto University
Use -by-the-hour
Accepted only between 9 am and 5 pm off campus

Other Research Institutes
Use -by-the-hour
Accepted only between 9 am and 5 pm off campus

Companies, etc.
Public offering

Notes

Person of Kyoto University：Please contact the person in charge.

Usage rules

Others：Project Zero Emission Energy Research　Please contact the person in charge.（(Paid use and use under a joint research agreement are available.)
※ For details on how to apply, please refer to the device’s website.
http://www.iae.kyoto-u.ac.jp/zero_emission/

Inquiries

Advanced Energy Conversion Division Advanced Energy Structural Materials Research Section（Contact:Omura)
TEL
0774-38-3568
MAIL
ohmura.takamasa.2r*kyoto-u.ac.jp　
※Please change 「*」 to 「@」 and send.

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