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Schottky field emission scanning electron microscope JSM-6500F

Model
JSM-6500F
Manufacturer
JEOL Ltd.
Specification
Schottky field emission electron gun (maximum acceleration voltage 30 kV), immersion objective lens, secondary electron detector (secondary electron image resolution 1.5 nm at 15 kV, 5.0 nm at 1 kV), backscattered electron detector, energy-dispersive X-ray analysis system.
Location
Yoshida Campus, Faculty of Engineering Engineering Science Depts Building Basement 1st floor, Room 002
Installation Year
2012
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Overview

It is a field emission scanning electron microscope used for surface morphology observation and compositional analysis of solid samples. It allows for observation of secondary electron images with a resolution of several nm, detection of elements from B and above with a detection limit of approximately 0.1 at.%, and EDX analysis with an X-ray generation area of approximately 1 um.

Responsible department

Materials Sciences and Engineering Department

Available Users

(1) Individuals who belong to a department or the Materials Science Course in the Department of Physics and Engineering in Kyoto University (hereinafter referred to as “the university”).
(2) Faculty or students of Kyoto University who belong to departments or courses other than the specified one.
(3) Individuals affiliated with national or local government bodies, national university corporations or university joint-use institutions, independent administrative institutions, or corporations or organizations engaged in educational or research activities.
(4) Individuals engaged in research and development activities in companies or other organizations.
(5) Other individuals deemed appropriate by the responsible manager.

Notes

Please attend the preliminary training and perform the measurement by yourself.
Please provide the purpose of use and sample information (conductivity, composition, shape, quantity) to the contact information below.

Usage rules
Inquiries

Materials Sciences and Engineering Department
Nobuharu Sasaki
075-753-5426
sasaki.nobuharu.7a*kyoto-u.ac.jp
※Please change 「*」 to 「@」 and send.

Application for use
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