Scanning electron microscope JSM-6500F

Model

JSM-6500F

Manufacturer

JEOL Ltd.

Specification

JSM-6500F, Acceleration voltage: 0.5-30 kV, Secondary electron image resolution: 1.5 nm (at 15 kV), 5.0 nm (at 1 kV), Magnification: 10,000-500,000x, Maximum sample size: φ30 mm.

Location

Katsura Campus, Building A1 Basement 1st floor, Room 009

Installation Year

2004

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Overview

This device is equipped with a high-brightness thermionic emission electron gun and a semi-inlens objective lens, making it suitable for observing surface structures with high resolution.

Responsible department

Electronic Science and Engineering Department

Available Users

(1) Individuals who belong to the Electronic Engineering Program (referred to as “the program”) in the Graduate School of Engineering at Kyoto University.
(2) Faculty or students of Kyoto University who do not belong to the category mentioned in the previous item.
(3) Individuals affiliated with national or local government bodies, national university corporations or university joint-use institutions, independent administrative institutions, or corporations or organizations engaged in educational or research activities.
(4) Individuals engaged in research and development activities in companies or other organizations.
(5) Other individuals deemed appropriate by the responsible manager.

Notes

Please attend the training session and perform the measurement by yourself.

Usage rules

https://www.t.kyoto-u.ac.jp/ja/research/yui/naiki/20210311-denshi

Inquiries

Electronic Science and Engineering Department
Kawakami Laboratory
075-383-2309
sem-yui*optomater.kuee.kyoto-u.ac.jp
※Please inform us of an overview of the usage (format optional) before submitting the application.
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USACO/Katsura Yui/MaCBES
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