Scanning electron microscope (FE-SEM) SU-8020
This device is a semi-inlens-type FE-SEM equipped with a cold-field emission electron gun, which is suitable for ultra-high-resolution observations. The movable range is ±25mm in both x and y directions, and the maximum sample size is Φ100mm. An ion sputtering device (Hitachi E-1030) is available, allowing for conductive coating with platinum-palladium. Please note that the following samples cannot be observed:
– Samples containing water or oil
– Powdered magnetic materials
Mechanical Engineering and Science Department
Micro Engineering Department
Aeronautics and Astronautics Department
(1) Individuals who belong to the Mechanical Engineering Group in the Graduate School of Engineering (referred to as “the graduate school”) at Kyoto University, or individuals who are faculty members of Kyoto University and belong to a cooperative course in the Mechanical Engineering Group.
(2) Faculty or students of the graduate school mentioned in the previous item who belong to groups other than the Mechanical Engineering Group.
(3) Faculty or students of Kyoto University who do not belong to the graduate school mentioned in the previous item, excluding those who belong to a cooperative course in the Mechanical Engineering Group.
(4) Individuals affiliated with national or local government bodies, national university corporations or university joint-use institutions, independent administrative institutions, or corporations or organizations engaged in educational or research activities.
(5) Individuals engaged in research and development activities in companies or other organizations.
(6) Other individuals deemed appropriate by the responsible manager.
Self-measurements by users are not permitted.The operation of the equipment is carried out by the staff of the Microscopy Laboratory in the Mechanical Engineering Group, under the instruction of the users.
Mechanical Engineering Common Microscopy Room
Kosuke Ishikawa
075-383-3736
ishikawa.kosuke.3s*kyoto-u.ac.jp
※Please change 「*」 to 「@」 and send.