Ultra-high resolution field emission scanning electron microscope (FE-SEM)
This device achieves high brightness of the electron gun and high sensitivity of the signal detection system, enabling high-resolution and high-contrast observation at low accelerating voltages as well as high sensitivity during analysis. It allows for observation at a maximum magnification of 1 million times, with a resolution of 0.8nm at 15kV and 1.1nm at 1kV. It is also equipped with an energy-dispersive X-ray spectroscopy (EDX) system, allowing for analysis of the composition of the sample based on compositional contrast as well as the analysis of chemical substance composition within the sample. The images indicating the analysis positions can be saved together with the data.
Molecular Engineering Department
(1) Individuals who belong to the Management Program in the Graduate School of Engineering (referred to as “the graduate school”) at Kyoto University.
(2) Faculty or students of the graduate school mentioned in the previous item who belong to departments or programs other than the Management Program.
(3) Faculty or students of Kyoto University who do not belong to the graduate school mentioned in the previous item.
(4) Individuals affiliated with national or local government bodies, national university corporations or university joint-use institutions, independent administrative institutions, or corporations or organizations engaged in educational or research activities.
(5) Individuals engaged in research and development activities in companies or other organizations.
(6) Other individuals deemed appropriate by the responsible manager.
Before user registration, it is necessary to receive an explanation and training regarding the usage methods and procedures. After that, measurements will be conducted by the users themselves.
Molecular Engineering Department
Imahori Laboratory
075-383-2567
t-higa*scl.kyoto-u.ac.jp
※Please change 「*」 to 「@」 and send.