High resolution RBS instrument

Model

Manufacturer

Kobe Steel, Ltd.

Specification

High-resolution RBS (Rutherford Backscattering Spectrometry) apparatus, Ion species: He+ ions, Maximum acceleration voltage: 400 kV, Maximum sample size (mm): 20×20×3, Depth resolution: below 1 nm

Location

Katsura Campus, Building C3 Basement 1st floor, Room bB1N01

Installation Year

2000

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Overview

It is ideal for analyzing the elemental composition of ultra-thin films. It allows for non-destructive depth profiling analysis with high resolution, ranging from the surface to a depth of several tens of nanometers. It is also capable of analyzing insulating materials.

Responsible department

Micro Engineering Department

Available Users

(1) Faculty or students of Kyoto University (hereinafter referred to as “the university”).
(2) Individuals affiliated with national or local government bodies, national university corporations or university joint-use institutions, independent administrative institutions, or corporations or organizations engaged in educational or research activities.
(3) Individuals engaged in research and development activities in companies or other organizations.
(4) Other individuals deemed appropriate by the responsible manager.

Notes

Measurement can be done by both requesting measurements and users themselves. However, attending a preliminary training is necessary.

Usage rules

https://www.t.kyoto-u.ac.jp/ja/research/yui/naiki/itrgsw

Inquiries

Micro Engineering Department
Kaoru Nakajima
075-383-3707
nakajima.kaoru.4a*kyoto-u.ac.jp
※Please change 「*」 to 「@」 and send.

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